超短脉冲激光的光斑中心坐标的测量装置及方法

Measurement device and method for spot central coordinates of ultra-short pulse laser

Abstract

本发明公开了一种超短脉冲激光的光斑中心坐标的测量装置及方法,该装置的结构是,包括固定在平移台上的光电传感器,光电传感器的阳极朝上;光电传感器与宽带示波器串联构成的电路与电容并联;电容与电阻、直流电源构成串联回路,利用上述装置,按照以下步骤实施:1)使超短脉冲激光垂直地入射光电传感器的阳极,光电传感器的两极之间施加直流偏置电压,将超短激光脉冲转换为超短电脉冲;2)粗调平移台,使宽带示波器上出现超短电脉冲的波形;3)先后沿x、y方向微调平移台,使超短电脉冲的幅值达到最大值;4)读取平移台显示的坐标读数,即为超短脉冲激光的光斑中心的测量数值。本发明结构简单、操作简便、测量准确。
The invention discloses a measurement device and method for spot central coordinates of an ultra-short pulse laser. The device is structured as follows: the device comprises a photoelectric sensor fixed on a translation stage, the positive electrode of the photoelectric sensor is upward; a circuit formed by connecting the photoelectric sensor with a wide-band oscilloscope in series is connected with a capacitor in parallel; and the capacitor forms a series loop with a resistor and a DC (direct current) power supply. With the measurement device, the method is carried out according to the following steps of: 1) enabling the ultra-short pulse laser to vertically irradiate on the positive electrode of the photoelectric sensor, applying DC bias voltage between two electrodes of the photoelectric sensor, and converting an ultra-short laser pulse into an ultra-short electric pulse; 2) coarsely tuning the translation stage to enable the wide-band oscilloscope to display waveform of the ultra-short electric pulse; 3) finely tuning the translation stage in an x direction and a y direction, orderly, to enable the amplitude of the ultra-short electric pulse to be maximum; and 4) reading coordinates numbers displayed on the translation stage, wherein the numbers are the measured numerical values of the spot center of the ultra-short pulse laser. The method and the device are simple in structure, simple and convenient to operate and accurate in measurement.

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